Third order silicon (Si) nitride side-walled grating using silicon-on-insulatir (SOI)
10.1117/12.888579
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Main Authors: | , , , |
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Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/72017 |
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Institution: | National University of Singapore |