Studies of optical properties of silicon-rich silicon nitride thin films

• Main Author: Cen, Zhanhong
• Other Authors: Chen Tupei
• Format: Theses and Dissertations
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/44566
• Institution: Nanyang Technological University

Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si...