Vertical silicon nanowire platform for low power electronics and clean energy applications

This paper reviews the progress of the vertical top-down nanowire technology platform developed to explore novel device architectures and integration schemes for green electronics and clean energy applications. Under electronics domain, besides having ultimate scaling potential, the vertical wire of...

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Bibliographic Details
Main Authors: Kwong, Dim Lee, Sun, Yuan, Singh, Navab, Lo, Guo-Qing, Li, X., Ramanathan, G., Chen, Z. X., Wong, S. M., Li, Y., Shen, N. S., Buddharaju, K., Yu, Y. H., Lee, S. J.
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/98006
http://hdl.handle.net/10220/17070
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Institution: Nanyang Technological University
Language: English
Description
Summary:This paper reviews the progress of the vertical top-down nanowire technology platform developed to explore novel device architectures and integration schemes for green electronics and clean energy applications. Under electronics domain, besides having ultimate scaling potential, the vertical wire offers (1) CMOS circuits with much smaller foot print as compared to planar transistor at the same technology node, (2) a natural platform for tunneling FETs, and (3) a route to fabricate stacked nonvolatile memory cells. Under clean energy harvesting area, vertical wires could provide (1) cost reduction in photovoltaic energy conversion through enhanced light trapping and (2) a fully CMOS compatible thermoelectric engine converting waste-heat into electricity. In addition to progress review, we discuss the challenges and future prospects with vertical nanowires platform.