Subwavelength lithography using metallic grating waveguide heterostructure
We present subwavelength periodic gratings achieved by employing a metallic grating waveguide heterostructure (MGWHS). The mask can be designed to make one of its diffraction order (±mth) waves resonate with the surface plasmon wave supported by the MGWHS. With a finite-difference time-domain method...
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sg-ntu-dr.10356-988872020-03-07T14:00:28Z Subwavelength lithography using metallic grating waveguide heterostructure Yang, Xuefeng Li, Weibin Zhang, Dao Hua School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering We present subwavelength periodic gratings achieved by employing a metallic grating waveguide heterostructure (MGWHS). The mask can be designed to make one of its diffraction order (±mth) waves resonate with the surface plasmon wave supported by the MGWHS. With a finite-difference time-domain method, we numerically demonstrate that one-dimensional periodic structure of about 60 nm feature, which is far beyond the diffraction limit, can be patterned with the interference of the 3rd diffraction order waves of the mask at a wavelength of 546 nm. The technique can also be extended to two-dimensional patterns using circularly polarized incidence and for the incidence with an angle θ. 2013-07-31T02:51:21Z 2019-12-06T20:00:49Z 2013-07-31T02:51:21Z 2019-12-06T20:00:49Z 2011 2011 Journal Article Yang, X., Li, W.,& Zhang, D. H. (2012). Subwavelength lithography using metallic grating waveguide heterostructure. Applied Physics A, 107(1), 123-126. https://hdl.handle.net/10356/98887 http://hdl.handle.net/10220/12541 10.1007/s00339-011-6752-y en Applied physics A |
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DRNTU::Engineering::Electrical and electronic engineering Yang, Xuefeng Li, Weibin Zhang, Dao Hua Subwavelength lithography using metallic grating waveguide heterostructure |
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We present subwavelength periodic gratings achieved by employing a metallic grating waveguide heterostructure (MGWHS). The mask can be designed to make one of its diffraction order (±mth) waves resonate with the surface plasmon wave supported by the MGWHS. With a finite-difference time-domain method, we numerically demonstrate that one-dimensional periodic structure of about 60 nm feature, which is far beyond the diffraction limit, can be patterned with the interference of the 3rd diffraction order waves of the mask at a wavelength of 546 nm. The technique can also be extended to two-dimensional patterns using circularly polarized incidence and for the incidence with an angle θ. |
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School of Electrical and Electronic Engineering |
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School of Electrical and Electronic Engineering Yang, Xuefeng Li, Weibin Zhang, Dao Hua |
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Article |
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Yang, Xuefeng Li, Weibin Zhang, Dao Hua |
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Yang, Xuefeng |
title |
Subwavelength lithography using metallic grating waveguide heterostructure |
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Subwavelength lithography using metallic grating waveguide heterostructure |
title_full |
Subwavelength lithography using metallic grating waveguide heterostructure |
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Subwavelength lithography using metallic grating waveguide heterostructure |
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Subwavelength lithography using metallic grating waveguide heterostructure |
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subwavelength lithography using metallic grating waveguide heterostructure |
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2013 |
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https://hdl.handle.net/10356/98887 http://hdl.handle.net/10220/12541 |
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