Physical spherical phase compensation in reflection digital holographic microscopy

• Main Authors: Qu, Weijuan, Chee, Oi Choo, Tan, Lewis Rongwei, Xu, Qiangsheng, Wang, Zhaomin, Xiao, Zhenzhong, Anand, Asundi
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/99611; http://hdl.handle.net/10220/13639
• Institution: Nanyang Technological University

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization wi...