Capability enhancement in compact digital holographic microscopy

Capability enhancement in compact digital holographic microscopy

A compact reflection digital holographic microscopy (DHM) system integrated with the light source and optical interferometer is developed for 3D topographic characterization and real-time dynamic inspection for Microelectromechanical systems (MEMS). Capability enhancement methods in lateral resoluti...

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Bibliographic Details
Main Authors: Qu, Weijuan, Wen, Yongfu, Wang, Zhaomin, Yang, Fang, Asundi, Anand
Other Authors: Quan, Chenggen
Format: Conference or Workshop Item
Language:English
Published: 2018
Subjects:
DRNTU::Engineering::Mechanical engineering
Resolution Enhancement
Digital Holographic Microscopy
Online Access:https://hdl.handle.net/10356/88315
http://hdl.handle.net/10220/46913
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/88315
http://hdl.handle.net/10220/46913

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