Capability enhancement in compact digital holographic microscopy

• المؤلفون الرئيسيون: Qu, Weijuan, Wen, Yongfu, Wang, Zhaomin, Yang, Fang, Asundi, Anand
• مؤلفون آخرون: Quan, Chenggen
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2018
• الموضوعات: DRNTU::Engineering::Mechanical engineering; Resolution Enhancement; Digital Holographic Microscopy
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/88315; http://hdl.handle.net/10220/46913
• المؤسسة: Nanyang Technological University

A compact reflection digital holographic microscopy (DHM) system integrated with the light source and optical interferometer is developed for 3D topographic characterization and real-time dynamic inspection for Microelectromechanical systems (MEMS). Capability enhancement methods in lateral resoluti...