Capability enhancement in compact digital holographic microscopy
A compact reflection digital holographic microscopy (DHM) system integrated with the light source and optical interferometer is developed for 3D topographic characterization and real-time dynamic inspection for Microelectromechanical systems (MEMS). Capability enhancement methods in lateral resoluti...
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Main Authors: | , , , , |
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Other Authors: | |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2018
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/88315 http://hdl.handle.net/10220/46913 |
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Institution: | Nanyang Technological University |
Language: | English |