Capability enhancement in compact digital holographic microscopy

• Main Authors: Qu, Weijuan, Wen, Yongfu, Wang, Zhaomin, Yang, Fang, Asundi, Anand
• 其他作者: Quan, Chenggen
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2018
• 主題: DRNTU::Engineering::Mechanical engineering; Resolution Enhancement; Digital Holographic Microscopy
• 在線閱讀: https://hdl.handle.net/10356/88315; http://hdl.handle.net/10220/46913

A compact reflection digital holographic microscopy (DHM) system integrated with the light source and optical interferometer is developed for 3D topographic characterization and real-time dynamic inspection for Microelectromechanical systems (MEMS). Capability enhancement methods in lateral resoluti...