Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction

Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction

Physical Review Letters

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Bibliographic Details
Main Authors: Xu, G., Feng, Z.C.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107083
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Institution: National University of Singapore
id sg-nus-scholar.10635-107083
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spelling sg-nus-scholar.10635-1070832015-01-31T03:21:05Z Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction Xu, G. Feng, Z.C. MATERIALS SCIENCE Physical Review Letters 84 9 1926-1929 PRLTA 2014-10-29T08:39:16Z 2014-10-29T08:39:16Z 2000-02-28 Article Xu, G.,Feng, Z.C. (2000-02-28). Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction. Physical Review Letters 84 (9) : 1926-1929. ScholarBank@NUS Repository. 00319007 http://scholarbank.nus.edu.sg/handle/10635/107083 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Physical Review Letters
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
Xu, G.
Feng, Z.C.
format Article
author Xu, G.
Feng, Z.C.
spellingShingle Xu, G.
Feng, Z.C.
Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
author_sort Xu, G.
title Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
title_short Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
title_full Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
title_fullStr Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
title_full_unstemmed Internal Atomic Distortion and Layer Roughness of Epitaxial SiC Thin Films Studied by Short Wavelength X-Ray Diffraction
title_sort internal atomic distortion and layer roughness of epitaxial sic thin films studied by short wavelength x-ray diffraction
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/107083
_version_ 1681093580579405824

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