Sn-containing composite thin films by plasma deposition of tetramethyltin

Sn-containing composite thin films by plasma deposition of tetramethyltin

10.1016/j.tsf.2004.06.100

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Bibliographic Details
Main Authors: Hu, J., Zong, Y., Wang, Y.-Z., Förch, R., Knoll, W.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Subjects:
Deposition/ablation balance
Plasma on-/off-time
Surface morphology
Tetramethyltin
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107194
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/107194

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