Sn-containing composite thin films by plasma deposition of tetramethyltin

• Main Authors: Hu, J., Zong, Y., Wang, Y.-Z., Förch, R., Knoll, W.
• Other Authors: MATERIALS SCIENCE
• Format: Article
• Published: 2014
• Subjects: Deposition/ablation balance; Plasma on-/off-time; Surface morphology; Tetramethyltin
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/107194
• Institution: National University of Singapore

10.1016/j.tsf.2004.06.100