Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits
Microelectronic Engineering
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2014
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sg-nus-scholar.10635-1129622015-01-14T18:08:06Z Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits Heiland, R. Leslie, A. INSTITUTE OF MICROELECTRONICS Microelectronic Engineering 24 1-4 51-58 MIENE 2014-11-28T08:12:44Z 2014-11-28T08:12:44Z 1994-03 Article Heiland, R.,Leslie, A. (1994-03). Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits. Microelectronic Engineering 24 (1-4) : 51-58. ScholarBank@NUS Repository. 01679317 http://scholarbank.nus.edu.sg/handle/10635/112962 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Microelectronic Engineering |
| author2 |
INSTITUTE OF MICROELECTRONICS |
| author_facet |
INSTITUTE OF MICROELECTRONICS Heiland, R. Leslie, A. |
| format |
Article |
| author |
Heiland, R. Leslie, A. |
| spellingShingle |
Heiland, R. Leslie, A. Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| author_sort |
Heiland, R. |
| title |
Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| title_short |
Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| title_full |
Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| title_fullStr |
Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| title_full_unstemmed |
Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| title_sort |
combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/112962 |
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1681094578528059392 |