Verification of selected electron beam induced current (EBIC) techniques

• المؤلف الرئيسي: Ang, Alex Yong Guan
• مؤلفون آخرون: Ong, Vincent Keng Sian
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/4104
• المؤسسة: Nanyang Technological University

The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (S...