Verification of selected electron beam induced current (EBIC) techniques

• Main Author: Ang, Alex Yong Guan
• Other Authors: Ong, Vincent Keng Sian
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/4104
• Institution: Nanyang Technological University

The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (S...