Verification of selected electron beam induced current (EBIC) techniques

• 主要作者: Ang, Alex Yong Guan
• 其他作者: Ong, Vincent Keng Sian
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• 在線閱讀: http://hdl.handle.net/10356/4104

The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (S...