Verification of selected electron beam induced current (EBIC) techniques

The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (S...

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Bibliographic Details
Main Author: Ang, Alex Yong Guan
Other Authors: Ong, Vincent Keng Sian
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/4104
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Institution: Nanyang Technological University

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