Junction depth & defect characterization with the use of EBIC

• 主要作者: Phua, Poh Chin.
• 其他作者: Ong, Vincent Keng Sian
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• 在線閱讀: http://hdl.handle.net/10356/3135
• 機構: Nanyang Technological University

There are two objectives to be achieved in this work. Firstly, it is desirable to determine a new method of reconstructing the charge collection probability so as to extract the junction depth of the device. Secondly, it is also desirable to extract the defect location using the perpendicular p-n ju...