Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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2014
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sg-nus-scholar.10635-1129702015-01-12T10:54:43Z Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method Sheng, T.T. Goh, G.P. Tung, C.H. Wang, L.F. INSTITUTE OF MICROELECTRONICS Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 3 610-613 JVTBD 2014-11-28T08:12:50Z 2014-11-28T08:12:50Z 1997-05 Article Sheng, T.T.,Goh, G.P.,Tung, C.H.,Wang, L.F. (1997-05). Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 (3) : 610-613. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/112970 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
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Singapore |
| collection |
ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
INSTITUTE OF MICROELECTRONICS |
| author_facet |
INSTITUTE OF MICROELECTRONICS Sheng, T.T. Goh, G.P. Tung, C.H. Wang, L.F. |
| format |
Article |
| author |
Sheng, T.T. Goh, G.P. Tung, C.H. Wang, L.F. |
| spellingShingle |
Sheng, T.T. Goh, G.P. Tung, C.H. Wang, L.F. Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| author_sort |
Sheng, T.T. |
| title |
Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| title_short |
Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| title_full |
Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| title_fullStr |
Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| title_full_unstemmed |
Precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| title_sort |
precision transmission electron microscopy sample preparation using a focused ion beam by extraction method |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/112970 |
| _version_ |
1681094579972997120 |