Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes
Vacuum
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sg-nus-scholar.10635-1129722024-11-09T19:48:12Z Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes Marks, M.R. Kintrup, L. Bittigau, K. INSTITUTE OF MICROELECTRONICS Vacuum 46 3 281-286 VACUA 2014-11-28T08:12:51Z 2014-11-28T08:12:51Z 1995-03 Article Marks, M.R.,Kintrup, L.,Bittigau, K. (1995-03). Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes. Vacuum 46 (3) : 281-286. ScholarBank@NUS Repository. 0042207X http://scholarbank.nus.edu.sg/handle/10635/112972 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
Vacuum |
| author2 |
INSTITUTE OF MICROELECTRONICS |
| author_facet |
INSTITUTE OF MICROELECTRONICS Marks, M.R. Kintrup, L. Bittigau, K. |
| format |
Article |
| author |
Marks, M.R. Kintrup, L. Bittigau, K. |
| spellingShingle |
Marks, M.R. Kintrup, L. Bittigau, K. Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| author_sort |
Marks, M.R. |
| title |
Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| title_short |
Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| title_full |
Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| title_fullStr |
Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| title_full_unstemmed |
Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes |
| title_sort |
small area x-ray photoelectron spectroscopy (saxps) analysis of microscopic contamination in semiconductor materials and processes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/112972 |
| _version_ |
1821210051339091968 |