Plasma cleaning of contaminated optical components of synchrotron radiation beam-line

10.3969/j.issn.1672-7126.2009.06.23

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Bibliographic Details
Main Authors:	Wei, W., Wang, Q., Wang, Y., Yu, X., Gao, X.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Carbon contamination Optical components Plasma Cleaning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113034
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113034
record_format	dspace
spelling	sg-nus-scholar.10635-1130342015-02-12T05:43:00Z Plasma cleaning of contaminated optical components of synchrotron radiation beam-line Wei, W. Wang, Q. Wang, Y. Yu, X. Gao, X. PHYSICS SINGAPORE SYNCHROTRON LIGHT SOURCE Carbon contamination Optical components Plasma Cleaning 10.3969/j.issn.1672-7126.2009.06.23 Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 29 6 704-706 2014-11-28T08:43:30Z 2014-11-28T08:43:30Z 2009-12 Article Wei, W.,Wang, Q.,Wang, Y.,Yu, X.,Gao, X. (2009-12). Plasma cleaning of contaminated optical components of synchrotron radiation beam-line. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 29 (6) : 704-706. ScholarBank@NUS Repository. <a href="https://doi.org/10.3969/j.issn.1672-7126.2009.06.23" target="_blank">https://doi.org/10.3969/j.issn.1672-7126.2009.06.23</a> 16727126 http://scholarbank.nus.edu.sg/handle/10635/113034 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Carbon contamination Optical components Plasma Cleaning
spellingShingle	Carbon contamination Optical components Plasma Cleaning Wei, W. Wang, Q. Wang, Y. Yu, X. Gao, X. Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
description	10.3969/j.issn.1672-7126.2009.06.23
author2	PHYSICS
author_facet	PHYSICS Wei, W. Wang, Q. Wang, Y. Yu, X. Gao, X.
format	Article
author	Wei, W. Wang, Q. Wang, Y. Yu, X. Gao, X.
author_sort	Wei, W.
title	Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
title_short	Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
title_full	Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
title_fullStr	Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
title_full_unstemmed	Plasma cleaning of contaminated optical components of synchrotron radiation beam-line
title_sort	plasma cleaning of contaminated optical components of synchrotron radiation beam-line
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113034
_version_	1681094591576539136

Plasma cleaning of contaminated optical components of synchrotron radiation beam-line

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