3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer

10.1007/s00542-012-1557-2

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Bibliographic Details
Main Authors:	Heussler, S.P., Moser, H.O., Kalaiselvi, S.M.P.
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113047
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113047
record_format	dspace
spelling	sg-nus-scholar.10635-1130472024-11-11T07:53:51Z 3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer Heussler, S.P. Moser, H.O. Kalaiselvi, S.M.P. SINGAPORE SYNCHROTRON LIGHT SOURCE 10.1007/s00542-012-1557-2 Microsystem Technologies 19 3 335-341 2014-11-28T08:43:40Z 2014-11-28T08:43:40Z 2013 Conference Paper Heussler, S.P., Moser, H.O., Kalaiselvi, S.M.P. (2013). 3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer. Microsystem Technologies 19 (3) : 335-341. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-012-1557-2 09467076 http://scholarbank.nus.edu.sg/handle/10635/113047 000315294000006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-012-1557-2
author2	SINGAPORE SYNCHROTRON LIGHT SOURCE
author_facet	SINGAPORE SYNCHROTRON LIGHT SOURCE Heussler, S.P. Moser, H.O. Kalaiselvi, S.M.P.
format	Conference or Workshop Item
author	Heussler, S.P. Moser, H.O. Kalaiselvi, S.M.P.
spellingShingle	Heussler, S.P. Moser, H.O. Kalaiselvi, S.M.P. 3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
author_sort	Heussler, S.P.
title	3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
title_short	3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
title_full	3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
title_fullStr	3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
title_full_unstemmed	3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
title_sort	3d deep x-ray lithography for producing a multi-channel fourier transform interferometer
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113047
_version_	1821193093637996544

3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer

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