X-ray-based micro/nanomanufacturing at SSLS - Technology and applications

X-ray-based micro/nanomanufacturing at SSLS - Technology and applications

10.1063/1.2436352

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Bibliographic Details
Main Authors: Jian, L.K., Casse, B.D.F., Heussler, S.P., Kong, J.R., Moser, H.O., Ren, Y.P., Saw, B.T., Bin Mahmood, S.
Other Authors: SINGAPORE SYNCHROTRON LIGHT SOURCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
LIGA
Micro/nanomanufacturing
Synchrotron radiation
X-ray lithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113066
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Institution: National University of Singapore
Description
Summary:10.1063/1.2436352

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