X-ray-based micro/nanomanufacturing at SSLS - Technology and applications
10.1063/1.2436352
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2014
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sg-nus-scholar.10635-1130662015-03-06T08:58:39Z X-ray-based micro/nanomanufacturing at SSLS - Technology and applications Jian, L.K. Casse, B.D.F. Heussler, S.P. Kong, J.R. Moser, H.O. Ren, Y.P. Saw, B.T. Bin Mahmood, S. SINGAPORE SYNCHROTRON LIGHT SOURCE LIGA Micro/nanomanufacturing Synchrotron radiation X-ray lithography 10.1063/1.2436352 AIP Conference Proceedings 879 1512-1515 2014-11-28T08:43:54Z 2014-11-28T08:43:54Z 2007 Conference Paper Jian, L.K.,Casse, B.D.F.,Heussler, S.P.,Kong, J.R.,Moser, H.O.,Ren, Y.P.,Saw, B.T.,Bin Mahmood, S. (2007). X-ray-based micro/nanomanufacturing at SSLS - Technology and applications. AIP Conference Proceedings 879 : 1512-1515. ScholarBank@NUS Repository. <a href="https://doi.org/10.1063/1.2436352" target="_blank">https://doi.org/10.1063/1.2436352</a> 0735403732 0094243X http://scholarbank.nus.edu.sg/handle/10635/113066 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
LIGA Micro/nanomanufacturing Synchrotron radiation X-ray lithography |
| spellingShingle |
LIGA Micro/nanomanufacturing Synchrotron radiation X-ray lithography Jian, L.K. Casse, B.D.F. Heussler, S.P. Kong, J.R. Moser, H.O. Ren, Y.P. Saw, B.T. Bin Mahmood, S. X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| description |
10.1063/1.2436352 |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Jian, L.K. Casse, B.D.F. Heussler, S.P. Kong, J.R. Moser, H.O. Ren, Y.P. Saw, B.T. Bin Mahmood, S. |
| format |
Conference or Workshop Item |
| author |
Jian, L.K. Casse, B.D.F. Heussler, S.P. Kong, J.R. Moser, H.O. Ren, Y.P. Saw, B.T. Bin Mahmood, S. |
| author_sort |
Jian, L.K. |
| title |
X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| title_short |
X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| title_full |
X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| title_fullStr |
X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| title_full_unstemmed |
X-ray-based micro/nanomanufacturing at SSLS - Technology and applications |
| title_sort |
x-ray-based micro/nanomanufacturing at ssls - technology and applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113066 |
| _version_ |
1681094597207392256 |