High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates

High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates

10.1063/1.2361160

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Bibliographic Details
Main Authors: Liu, Y., Liu, Z.W., Tan, C.Y., Ong, C.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113082
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Institution: National University of Singapore
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Summary:10.1063/1.2361160

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