High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates

10.1063/1.2361160

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Main Authors: Liu, Y., Liu, Z.W., Tan, C.Y., Ong, C.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113082
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1130822023-10-26T21:27:55Z High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates Liu, Y. Liu, Z.W. Tan, C.Y. Ong, C.K. PHYSICS INSTITUTE OF ENGINEERING SCIENCE 10.1063/1.2361160 Journal of Applied Physics 100 9 - JAPIA 2014-11-28T09:11:47Z 2014-11-28T09:11:47Z 2006 Article Liu, Y., Liu, Z.W., Tan, C.Y., Ong, C.K. (2006). High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates. Journal of Applied Physics 100 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2361160 00218979 http://scholarbank.nus.edu.sg/handle/10635/113082 000242041500069 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2361160
author2 PHYSICS
author_facet PHYSICS
Liu, Y.
Liu, Z.W.
Tan, C.Y.
Ong, C.K.
format Article
author Liu, Y.
Liu, Z.W.
Tan, C.Y.
Ong, C.K.
spellingShingle Liu, Y.
Liu, Z.W.
Tan, C.Y.
Ong, C.K.
High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
author_sort Liu, Y.
title High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
title_short High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
title_full High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
title_fullStr High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
title_full_unstemmed High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates
title_sort high frequency characteristics of fecon thin films fabricated by sputtering at various (ar+n2) gas flow rates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/113082
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