Atomic force microscopy investigation of the O2 +-induced surface topography of InP

Surface and Interface Analysis

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Bibliographic Details
Main Authors: Pan, J.S., Tay, S.T., Huan, C.H.A., Wee, A.T.S.
Other Authors: INST OF MATERIALS RESEARCH & ENGINEERING
Format: Article
Published: 2014
Subjects:
AFM
InP
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113228
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Institution: National University of Singapore