Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine

10.1016/S0925-9635(03)00025-6

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Bibliographic Details
Main Authors:	Loh, K.P., Fan, W.Y., Lim, C.W., Zhang, X., Chen, W., Xie, X.N., Xu, H., Wee, A.T.S.
Other Authors:	CHEMISTRY
Format:	Article
Published:	2014
Subjects:	Boron nitride Chemical vapor deposition Nanotubes Radio-frequency plasma
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/115258
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-115258
record_format	dspace
spelling	sg-nus-scholar.10635-1152582023-10-27T08:04:38Z Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine Loh, K.P. Fan, W.Y. Lim, C.W. Zhang, X. Chen, W. Xie, X.N. Xu, H. Wee, A.T.S. CHEMISTRY NUS NANOSCIENCE & NANOTECH INITIATIVE PHYSICS Boron nitride Chemical vapor deposition Nanotubes Radio-frequency plasma 10.1016/S0925-9635(03)00025-6 Diamond and Related Materials 12 3-7 1103-1107 DRMTE 2014-12-12T07:13:10Z 2014-12-12T07:13:10Z 2003-03 Article Loh, K.P., Fan, W.Y., Lim, C.W., Zhang, X., Chen, W., Xie, X.N., Xu, H., Wee, A.T.S. (2003-03). Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine. Diamond and Related Materials 12 (3-7) : 1103-1107. ScholarBank@NUS Repository. https://doi.org/10.1016/S0925-9635(03)00025-6 09259635 http://scholarbank.nus.edu.sg/handle/10635/115258 000182872000167 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Boron nitride Chemical vapor deposition Nanotubes Radio-frequency plasma
spellingShingle	Boron nitride Chemical vapor deposition Nanotubes Radio-frequency plasma Loh, K.P. Fan, W.Y. Lim, C.W. Zhang, X. Chen, W. Xie, X.N. Xu, H. Wee, A.T.S. Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
description	10.1016/S0925-9635(03)00025-6
author2	CHEMISTRY
author_facet	CHEMISTRY Loh, K.P. Fan, W.Y. Lim, C.W. Zhang, X. Chen, W. Xie, X.N. Xu, H. Wee, A.T.S.
format	Article
author	Loh, K.P. Fan, W.Y. Lim, C.W. Zhang, X. Chen, W. Xie, X.N. Xu, H. Wee, A.T.S.
author_sort	Loh, K.P.
title	Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
title_short	Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
title_full	Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
title_fullStr	Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
title_full_unstemmed	Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
title_sort	reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/115258
_version_	1781789370875904000

Reactive atom beam deposition of boron nitride ultrathin films and nanoparticles using borazine

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