Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering

10.1016/j.nimb.2006.03.170

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Main Authors:	Tan, S.K., Liu, R., Sow, C.H., Wee, A.T.S.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Subjects:	InP Ion beam sputtering Nanodots
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/115927
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1159272023-10-30T10:04:21Z Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering Tan, S.K. Liu, R. Sow, C.H. Wee, A.T.S. INSTITUTE OF ENGINEERING SCIENCE PHYSICS InP Ion beam sputtering Nanodots 10.1016/j.nimb.2006.03.170 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 248 1 83-89 NIMBE 2014-12-12T07:34:14Z 2014-12-12T07:34:14Z 2006-07 Article Tan, S.K., Liu, R., Sow, C.H., Wee, A.T.S. (2006-07). Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 248 (1) : 83-89. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2006.03.170 0168583X http://scholarbank.nus.edu.sg/handle/10635/115927 000238767300015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	InP Ion beam sputtering Nanodots
spellingShingle	InP Ion beam sputtering Nanodots Tan, S.K. Liu, R. Sow, C.H. Wee, A.T.S. Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
description	10.1016/j.nimb.2006.03.170
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Tan, S.K. Liu, R. Sow, C.H. Wee, A.T.S.
format	Article
author	Tan, S.K. Liu, R. Sow, C.H. Wee, A.T.S.
author_sort	Tan, S.K.
title	Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
title_short	Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
title_full	Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
title_fullStr	Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
title_full_unstemmed	Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
title_sort	self-organized nanodot formation on inp(1 0 0) by oxygen ion sputtering
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/115927
_version_	1781789453956677632

Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering

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