Optical heterodyne surface profiling interferometer with automatic focusing

Optical heterodyne surface profiling interferometer with automatic focusing

10.1117/12.284032

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Bibliographic Details
Main Authors: Hongzhi, Z., Ronga, L., Yongjun, W., Dacheng, L., Mang, C.
Other Authors: DATA STORAGE INSTITUTE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Automatic focusing
Automatic voltage control
Phase measurement
Profiling interferometer
Online Access:http://scholarbank.nus.edu.sg/handle/10635/116109
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Institution: National University of Singapore
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Summary:10.1117/12.284032

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