Optical heterodyne surface profiling interferometer with automatic focusing

10.1117/12.284032

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Bibliographic Details
Main Authors:	Hongzhi, Z., Ronga, L., Yongjun, W., Dacheng, L., Mang, C.
Other Authors:	DATA STORAGE INSTITUTE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Automatic focusing Automatic voltage control Phase measurement Profiling interferometer
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/116109
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-116109
record_format	dspace
spelling	sg-nus-scholar.10635-1161092023-09-03T20:25:19Z Optical heterodyne surface profiling interferometer with automatic focusing Hongzhi, Z. Ronga, L. Yongjun, W. Dacheng, L. Mang, C. DATA STORAGE INSTITUTE Automatic focusing Automatic voltage control Phase measurement Profiling interferometer 10.1117/12.284032 Proceedings of SPIE - The International Society for Optical Engineering 3185 100-104 PSISD 2014-12-12T07:36:28Z 2014-12-12T07:36:28Z 1997 Conference Paper Hongzhi, Z., Ronga, L., Yongjun, W., Dacheng, L., Mang, C. (1997). Optical heterodyne surface profiling interferometer with automatic focusing. Proceedings of SPIE - The International Society for Optical Engineering 3185 : 100-104. ScholarBank@NUS Repository. https://doi.org/10.1117/12.284032 0277786X http://scholarbank.nus.edu.sg/handle/10635/116109 A1997BJ98D00011 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Automatic focusing Automatic voltage control Phase measurement Profiling interferometer
spellingShingle	Automatic focusing Automatic voltage control Phase measurement Profiling interferometer Hongzhi, Z. Ronga, L. Yongjun, W. Dacheng, L. Mang, C. Optical heterodyne surface profiling interferometer with automatic focusing
description	10.1117/12.284032
author2	DATA STORAGE INSTITUTE
author_facet	DATA STORAGE INSTITUTE Hongzhi, Z. Ronga, L. Yongjun, W. Dacheng, L. Mang, C.
format	Conference or Workshop Item
author	Hongzhi, Z. Ronga, L. Yongjun, W. Dacheng, L. Mang, C.
author_sort	Hongzhi, Z.
title	Optical heterodyne surface profiling interferometer with automatic focusing
title_short	Optical heterodyne surface profiling interferometer with automatic focusing
title_full	Optical heterodyne surface profiling interferometer with automatic focusing
title_fullStr	Optical heterodyne surface profiling interferometer with automatic focusing
title_full_unstemmed	Optical heterodyne surface profiling interferometer with automatic focusing
title_sort	optical heterodyne surface profiling interferometer with automatic focusing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/116109
_version_	1776262217897869312

Optical heterodyne surface profiling interferometer with automatic focusing

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