DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES

Ph.D

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Bibliographic Details
Main Author:	WANG TAO
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2016
Subjects:	MEMS, Piezoelectric, Ultrasound, Sensor, Microelectronics
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/123829
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-123829
record_format	dspace
spelling	sg-nus-scholar.10635-1238292017-06-01T19:39:59Z DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES WANG TAO ELECTRICAL & COMPUTER ENGINEERING LEE CHENGKUO MEMS, Piezoelectric, Ultrasound, Sensor, Microelectronics Ph.D DOCTOR OF PHILOSOPHY 2016-05-06T18:00:07Z 2016-05-06T18:00:07Z 2016-01-18 Thesis WANG TAO (2016-01-18). DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/123829 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	MEMS, Piezoelectric, Ultrasound, Sensor, Microelectronics
spellingShingle	MEMS, Piezoelectric, Ultrasound, Sensor, Microelectronics WANG TAO DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING WANG TAO
format	Theses and Dissertations
author	WANG TAO
author_sort	WANG TAO
title	DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
title_short	DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
title_full	DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
title_fullStr	DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
title_full_unstemmed	DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES
title_sort	development of piezoelectric mems devices
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/123829
_version_	1681095967726632960

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