Run-to-run control in semiconductor manufacturing

Master's

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Bibliographic Details
Main Author:	VARADARAJAN GANESH KUMAR
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	RUN-TO-RUN, CMP, SEMICONDUCTOR MANUFACTURING, APC, EWMA, ADAPTIVE CONTROL
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13463
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13463
record_format	dspace
spelling	sg-nus-scholar.10635-134632015-01-07T20:40:24Z Run-to-run control in semiconductor manufacturing VARADARAJAN GANESH KUMAR ELECTRICAL & COMPUTER ENGINEERING ABDULLAH AL MAMUN TAY EE BENG, ARTHUR RUN-TO-RUN, CMP, SEMICONDUCTOR MANUFACTURING, APC, EWMA, ADAPTIVE CONTROL Master's MASTER OF ENGINEERING 2010-04-08T10:33:13Z 2010-04-08T10:33:13Z 2003-11-08 Thesis VARADARAJAN GANESH KUMAR (2003-11-08). Run-to-run control in semiconductor manufacturing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13463 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	RUN-TO-RUN, CMP, SEMICONDUCTOR MANUFACTURING, APC, EWMA, ADAPTIVE CONTROL
spellingShingle	RUN-TO-RUN, CMP, SEMICONDUCTOR MANUFACTURING, APC, EWMA, ADAPTIVE CONTROL VARADARAJAN GANESH KUMAR Run-to-run control in semiconductor manufacturing
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING VARADARAJAN GANESH KUMAR
format	Theses and Dissertations
author	VARADARAJAN GANESH KUMAR
author_sort	VARADARAJAN GANESH KUMAR
title	Run-to-run control in semiconductor manufacturing
title_short	Run-to-run control in semiconductor manufacturing
title_full	Run-to-run control in semiconductor manufacturing
title_fullStr	Run-to-run control in semiconductor manufacturing
title_full_unstemmed	Run-to-run control in semiconductor manufacturing
title_sort	run-to-run control in semiconductor manufacturing
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13463
_version_	1681078862078803968

Run-to-run control in semiconductor manufacturing

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