Run-to-run control in semiconductor manufacturing

Master's

Saved in:

Bibliographic Details
Main Author:	VARADARAJAN GANESH KUMAR
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	RUN-TO-RUN, CMP, SEMICONDUCTOR MANUFACTURING, APC, EWMA, ADAPTIVE CONTROL
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13463
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

Be the first to leave a comment!

Similar Items