FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING

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Bibliographic Details
Main Author:	CHONG WEE XUAN
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2017
Subjects:	DRIE NAND Staircase structure Manufacturing process
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/134669
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-134669
record_format	dspace
spelling	sg-nus-scholar.10635-1346692017-02-09T20:39:23Z FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING CHONG WEE XUAN MECHANICAL ENGINEERING ZHOU GUANGYA DRIE NAND Staircase structure Manufacturing process Master's MASTER OF ENGINEERING 2017-01-31T18:00:16Z 2017-01-31T18:00:16Z 2016-06-20 Thesis CHONG WEE XUAN (2016-06-20). FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/134669 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	DRIE NAND Staircase structure Manufacturing process
spellingShingle	DRIE NAND Staircase structure Manufacturing process CHONG WEE XUAN FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING CHONG WEE XUAN
format	Theses and Dissertations
author	CHONG WEE XUAN
author_sort	CHONG WEE XUAN
title	FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
title_short	FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
title_full	FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
title_fullStr	FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
title_full_unstemmed	FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING
title_sort	fabrication of staircase structure by anisotropic deep reactive ion silicon etching
publishDate	2017
url	http://scholarbank.nus.edu.sg/handle/10635/134669
_version_	1681097672959721472

FABRICATION OF STAIRCASE STRUCTURE BY ANISOTROPIC DEEP REACTIVE ION SILICON ETCHING

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