Micromachining of silicon using ion beams and electrochemical etching

Master's

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Bibliographic Details
Main Author:	TAVERNIER EMMANUEL PIERRE
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Silicon micromachining, ion beam, porous silicon, multi-level structures, silicon needles, high aspect-ratio
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13482
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13482
record_format	dspace
spelling	sg-nus-scholar.10635-134822015-02-23T07:12:44Z Micromachining of silicon using ion beams and electrochemical etching TAVERNIER EMMANUEL PIERRE PHYSICS MARK B H BREESE Silicon micromachining, ion beam, porous silicon, multi-level structures, silicon needles, high aspect-ratio Master's MASTER OF SCIENCE 2010-04-08T10:33:28Z 2010-04-08T10:33:28Z 2003-11-12 Thesis TAVERNIER EMMANUEL PIERRE (2003-11-12). Micromachining of silicon using ion beams and electrochemical etching. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13482 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Silicon micromachining, ion beam, porous silicon, multi-level structures, silicon needles, high aspect-ratio
spellingShingle	Silicon micromachining, ion beam, porous silicon, multi-level structures, silicon needles, high aspect-ratio TAVERNIER EMMANUEL PIERRE Micromachining of silicon using ion beams and electrochemical etching
description	Master's
author2	PHYSICS
author_facet	PHYSICS TAVERNIER EMMANUEL PIERRE
format	Theses and Dissertations
author	TAVERNIER EMMANUEL PIERRE
author_sort	TAVERNIER EMMANUEL PIERRE
title	Micromachining of silicon using ion beams and electrochemical etching
title_short	Micromachining of silicon using ion beams and electrochemical etching
title_full	Micromachining of silicon using ion beams and electrochemical etching
title_fullStr	Micromachining of silicon using ion beams and electrochemical etching
title_full_unstemmed	Micromachining of silicon using ion beams and electrochemical etching
title_sort	micromachining of silicon using ion beams and electrochemical etching
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13482
_version_	1681078865307369472

Micromachining of silicon using ion beams and electrochemical etching

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