Development of in-situ techniques for predicting PEB temperature

Master's

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Bibliographic Details
Main Author:	LI FENG YIING, REGINALD
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	post-exposure bake, temperature measurement, in-situ, sensor, uniformity, thermal contact
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13706
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13706
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spelling	sg-nus-scholar.10635-137062015-02-14T06:29:14Z Development of in-situ techniques for predicting PEB temperature LI FENG YIING, REGINALD ELECTRICAL & COMPUTER ENGINEERING TAN WOEI WAN post-exposure bake, temperature measurement, in-situ, sensor, uniformity, thermal contact Master's MASTER OF ENGINEERING 2010-04-08T10:35:39Z 2010-04-08T10:35:39Z 2004-01-13 Thesis LI FENG YIING, REGINALD (2004-01-13). Development of in-situ techniques for predicting PEB temperature. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13706 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	post-exposure bake, temperature measurement, in-situ, sensor, uniformity, thermal contact
spellingShingle	post-exposure bake, temperature measurement, in-situ, sensor, uniformity, thermal contact LI FENG YIING, REGINALD Development of in-situ techniques for predicting PEB temperature
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LI FENG YIING, REGINALD
format	Theses and Dissertations
author	LI FENG YIING, REGINALD
author_sort	LI FENG YIING, REGINALD
title	Development of in-situ techniques for predicting PEB temperature
title_short	Development of in-situ techniques for predicting PEB temperature
title_full	Development of in-situ techniques for predicting PEB temperature
title_fullStr	Development of in-situ techniques for predicting PEB temperature
title_full_unstemmed	Development of in-situ techniques for predicting PEB temperature
title_sort	development of in-situ techniques for predicting peb temperature
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13706
_version_	1681078903465050112

Development of in-situ techniques for predicting PEB temperature

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