DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

Ph.D

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Bibliographic Details
Main Author:	XU XINXIN
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2017
Subjects:	Nano-aperture ion source, high brightness, proton beam writing, lithography, sub-10 nm
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/137730
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-137730
record_format	dspace
spelling	sg-nus-scholar.10635-1377302024-10-25T19:56:33Z DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS XU XINXIN PHYSICS VAN KAN, JEROEN ANTON Nano-aperture ion source, high brightness, proton beam writing, lithography, sub-10 nm Ph.D DOCTOR OF PHILOSOPHY 2017-12-07T18:02:34Z 2017-12-07T18:02:34Z 2017-08-25 Thesis XU XINXIN (2017-08-25). DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/137730 0000-0001-9131-0693 en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Nano-aperture ion source, high brightness, proton beam writing, lithography, sub-10 nm
spellingShingle	Nano-aperture ion source, high brightness, proton beam writing, lithography, sub-10 nm XU XINXIN DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS XU XINXIN
format	Theses and Dissertations
author	XU XINXIN
author_sort	XU XINXIN
title	DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_short	DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_full	DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_fullStr	DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_full_unstemmed	DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
title_sort	development and optimization of high brightness nano-aperture ion source for proton beam writing applications
publishDate	2017
url	http://scholarbank.nus.edu.sg/handle/10635/137730
_version_	1821190518256697344

DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

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