DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS

Ph.D

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Bibliographic Details
Main Author:	XU XINXIN
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2017
Subjects:	Nano-aperture ion source, high brightness, proton beam writing, lithography, sub-10 nm
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/137730
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

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