High resolution backside SIMS depth profiling
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/14293 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-142932015-01-17T08:24:24Z High resolution backside SIMS depth profiling YEO KWEE LIANG PHYSICS WEE THYE SHEN, ANDREW Backside SIMS, Backside silicon etching, Ultra shallow depth profiling, Boron penetration, MRI model, Boron diffusion. Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:41:45Z 2010-04-08T10:41:45Z 2004-10-18 Thesis YEO KWEE LIANG (2004-10-18). High resolution backside SIMS depth profiling. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14293 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Backside SIMS, Backside silicon etching, Ultra shallow depth profiling, Boron penetration, MRI model, Boron diffusion. |
| spellingShingle |
Backside SIMS, Backside silicon etching, Ultra shallow depth profiling, Boron penetration, MRI model, Boron diffusion. YEO KWEE LIANG High resolution backside SIMS depth profiling |
| description |
Ph.D |
| author2 |
PHYSICS |
| author_facet |
PHYSICS YEO KWEE LIANG |
| format |
Theses and Dissertations |
| author |
YEO KWEE LIANG |
| author_sort |
YEO KWEE LIANG |
| title |
High resolution backside SIMS depth profiling |
| title_short |
High resolution backside SIMS depth profiling |
| title_full |
High resolution backside SIMS depth profiling |
| title_fullStr |
High resolution backside SIMS depth profiling |
| title_full_unstemmed |
High resolution backside SIMS depth profiling |
| title_sort |
high resolution backside sims depth profiling |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/14293 |
| _version_ |
1681079002642513920 |