Study of TMCTS based PECVD carbon-doped low dielectric constant material
Master's
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2010
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/14331 |
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sg-nus-scholar.10635-143312020-11-18T02:58:41Z Study of TMCTS based PECVD carbon-doped low dielectric constant material XIE JIELIN PHYSICS LIN JIANYI Low-Dielectric constant; PECVD; TMCTS; Carbon doped; Thermal stability; Plasma Master's MASTER OF SCIENCE 2010-04-08T10:42:05Z 2010-04-08T10:42:05Z 2004-10-01 Thesis XIE JIELIN (2004-10-01). Study of TMCTS based PECVD carbon-doped low dielectric constant material. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/14331 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Low-Dielectric constant; PECVD; TMCTS; Carbon doped; Thermal stability; Plasma |
| spellingShingle |
Low-Dielectric constant; PECVD; TMCTS; Carbon doped; Thermal stability; Plasma XIE JIELIN Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| description |
Master's |
| author2 |
PHYSICS |
| author_facet |
PHYSICS XIE JIELIN |
| format |
Theses and Dissertations |
| author |
XIE JIELIN |
| author_sort |
XIE JIELIN |
| title |
Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| title_short |
Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| title_full |
Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| title_fullStr |
Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| title_full_unstemmed |
Study of TMCTS based PECVD carbon-doped low dielectric constant material |
| title_sort |
study of tmcts based pecvd carbon-doped low dielectric constant material |
| publishDate |
2010 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/14331 |
| _version_ |
1684664519466418176 |