Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD

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Bibliographic Details
Main Author:	CHEN WEN
Other Authors:	MATERIALS SCIENCE
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Cu-Al-O, Optical property, Mechanical property
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14579
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14579
record_format	dspace
spelling	sg-nus-scholar.10635-145792015-02-03T11:24:05Z Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD CHEN WEN MATERIALS SCIENCE GONG HAO Cu-Al-O, Optical property, Mechanical property Master's MASTER OF SCIENCE 2010-04-08T10:44:37Z 2010-04-08T10:44:37Z 2005-04-06 Thesis CHEN WEN (2005-04-06). Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14579 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Cu-Al-O, Optical property, Mechanical property
spellingShingle	Cu-Al-O, Optical property, Mechanical property CHEN WEN Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
description	Master's
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE CHEN WEN
format	Theses and Dissertations
author	CHEN WEN
author_sort	CHEN WEN
title	Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
title_short	Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
title_full	Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
title_fullStr	Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
title_full_unstemmed	Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD
title_sort	optical and mechanical properties of cu-al-o thin films prepared by plasma-enhance cvd
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14579
_version_	1681079050730209280

Optical and mechanical properties of Cu-Al-O thin films prepared by plasma-enhance CVD

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