Surface processing of nanoporous low dielectric constant thin films

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Bibliographic Details
Main Author:	LIU JUN
Other Authors:	CHEMISTRY
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Low-k, Porosity, Plasma treatment, Densified layer, Diffusion Barrier and BN
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/14604
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14604
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spelling	sg-nus-scholar.10635-146042020-11-18T05:00:54Z Surface processing of nanoporous low dielectric constant thin films LIU JUN CHEMISTRY LOH KIAN PING Low-k, Porosity, Plasma treatment, Densified layer, Diffusion Barrier and BN Master's MASTER OF SCIENCE 2010-04-08T10:44:53Z 2010-04-08T10:44:53Z 2005-03-07 Thesis LIU JUN (2005-03-07). Surface processing of nanoporous low dielectric constant thin films. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/14604 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Low-k, Porosity, Plasma treatment, Densified layer, Diffusion Barrier and BN
spellingShingle	Low-k, Porosity, Plasma treatment, Densified layer, Diffusion Barrier and BN LIU JUN Surface processing of nanoporous low dielectric constant thin films
description	Master's
author2	CHEMISTRY
author_facet	CHEMISTRY LIU JUN
format	Theses and Dissertations
author	LIU JUN
author_sort	LIU JUN
title	Surface processing of nanoporous low dielectric constant thin films
title_short	Surface processing of nanoporous low dielectric constant thin films
title_full	Surface processing of nanoporous low dielectric constant thin films
title_fullStr	Surface processing of nanoporous low dielectric constant thin films
title_full_unstemmed	Surface processing of nanoporous low dielectric constant thin films
title_sort	surface processing of nanoporous low dielectric constant thin films
publishDate	2010
url	https://scholarbank.nus.edu.sg/handle/10635/14604
_version_	1684664526976319488

Surface processing of nanoporous low dielectric constant thin films

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