MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY

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Main Author:	COLIN PEERIS
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2018
Subjects:	Carbon Nanotubes, Lithography, Direct Cathode Projection Lithography, Microscopy, Field emission
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/146930
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-146930
record_format	dspace
spelling	sg-nus-scholar.10635-1469302019-04-12T15:00:28Z MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY COLIN PEERIS ELECTRICAL & COMPUTER ENGINEERING KHURSHEED, ANJAM Carbon Nanotubes, Lithography, Direct Cathode Projection Lithography, Microscopy, Field emission Master's MASTER OF ENGINEERING 2018-08-31T18:00:34Z 2018-08-31T18:00:34Z 2018-02-27 Thesis COLIN PEERIS (2018-02-27). MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/146930 en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Carbon Nanotubes, Lithography, Direct Cathode Projection Lithography, Microscopy, Field emission
spellingShingle	Carbon Nanotubes, Lithography, Direct Cathode Projection Lithography, Microscopy, Field emission COLIN PEERIS MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING COLIN PEERIS
format	Theses and Dissertations
author	COLIN PEERIS
author_sort	COLIN PEERIS
title	MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
title_short	MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
title_full	MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
title_fullStr	MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
title_full_unstemmed	MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY
title_sort	microfabricated electron/ion sources for electron microscopy and lithography
publishDate	2018
url	http://scholarbank.nus.edu.sg/handle/10635/146930
_version_	1681098681531498496

MICROFABRICATED ELECTRON/ION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY

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