Temperature regulation and in-situ fault detection of wafer warpage

Master's

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Bibliographic Details
Main Author:	CHEN WEI
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Wafer warpage, Fault detection,Feedforward, Temperature control,Lithogrophy,Semiconductor manufacturing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14831
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14831
record_format	dspace
spelling	sg-nus-scholar.10635-148312017-10-21T05:52:47Z Temperature regulation and in-situ fault detection of wafer warpage CHEN WEI MECHANICAL ENGINEERING YAP, CHRISTOPHER ROBERT HO WENG KHUEN Wafer warpage, Fault detection,Feedforward, Temperature control,Lithogrophy,Semiconductor manufacturing Master's MASTER OF ENGINEERING 2010-04-08T10:47:16Z 2010-04-08T10:47:16Z 2005-06-07 Thesis CHEN WEI (2005-06-07). Temperature regulation and in-situ fault detection of wafer warpage. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14831 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Wafer warpage, Fault detection,Feedforward, Temperature control,Lithogrophy,Semiconductor manufacturing
spellingShingle	Wafer warpage, Fault detection,Feedforward, Temperature control,Lithogrophy,Semiconductor manufacturing CHEN WEI Temperature regulation and in-situ fault detection of wafer warpage
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING CHEN WEI
format	Theses and Dissertations
author	CHEN WEI
author_sort	CHEN WEI
title	Temperature regulation and in-situ fault detection of wafer warpage
title_short	Temperature regulation and in-situ fault detection of wafer warpage
title_full	Temperature regulation and in-situ fault detection of wafer warpage
title_fullStr	Temperature regulation and in-situ fault detection of wafer warpage
title_full_unstemmed	Temperature regulation and in-situ fault detection of wafer warpage
title_sort	temperature regulation and in-situ fault detection of wafer warpage
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14831
_version_	1681079092925956096

Temperature regulation and in-situ fault detection of wafer warpage

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