Development of a novel ELID technique for machining of silicon wafers

Master's

Saved in:

Bibliographic Details
Main Author:	MOHAMMAD MAJHARUL ISLAM
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Single crystal silicon wafers, Fine super-abrasive wheel, IE assisted ELID, Grinding performance, ground silicon wafer surface quality, subsurface
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14853
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14853
record_format	dspace
spelling	sg-nus-scholar.10635-148532024-10-25T13:40:36Z Development of a novel ELID technique for machining of silicon wafers MOHAMMAD MAJHARUL ISLAM MECHANICAL ENGINEERING SENTHIL KUMAR, A Single crystal silicon wafers, Fine super-abrasive wheel, IE assisted ELID, Grinding performance, ground silicon wafer surface quality, subsurface Master's MASTER OF ENGINEERING 2010-04-08T10:47:30Z 2010-04-08T10:47:30Z 2005-07-12 Thesis MOHAMMAD MAJHARUL ISLAM (2005-07-12). Development of a novel ELID technique for machining of silicon wafers. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14853 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Single crystal silicon wafers, Fine super-abrasive wheel, IE assisted ELID, Grinding performance, ground silicon wafer surface quality, subsurface
spellingShingle	Single crystal silicon wafers, Fine super-abrasive wheel, IE assisted ELID, Grinding performance, ground silicon wafer surface quality, subsurface MOHAMMAD MAJHARUL ISLAM Development of a novel ELID technique for machining of silicon wafers
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING MOHAMMAD MAJHARUL ISLAM
format	Theses and Dissertations
author	MOHAMMAD MAJHARUL ISLAM
author_sort	MOHAMMAD MAJHARUL ISLAM
title	Development of a novel ELID technique for machining of silicon wafers
title_short	Development of a novel ELID technique for machining of silicon wafers
title_full	Development of a novel ELID technique for machining of silicon wafers
title_fullStr	Development of a novel ELID technique for machining of silicon wafers
title_full_unstemmed	Development of a novel ELID technique for machining of silicon wafers
title_sort	development of a novel elid technique for machining of silicon wafers
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14853
_version_	1821202191199764480

Development of a novel ELID technique for machining of silicon wafers

Similar Items