Development of a novel ELID technique for machining of silicon wafers

• Main Author: MOHAMMAD MAJHARUL ISLAM
• Other Authors: MECHANICAL ENGINEERING
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: Single crystal silicon wafers, Fine super-abrasive wheel, IE assisted ELID, Grinding performance, ground silicon wafer surface quality, subsurface
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/14853
• Institution: National University of Singapore

Master's