Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA

Ph.D

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Main Author: CHAMMIKA N B UDALAGAMA
Other Authors: PHYSICS
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/15253
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-152532015-01-12T20:09:15Z Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA CHAMMIKA N B UDALAGAMA PHYSICS WATT, FRANK BETTIOL, ANDREW ANTHONY Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:51:35Z 2010-04-08T10:51:35Z 2006-04-11 Thesis CHAMMIKA N B UDALAGAMA (2006-04-11). Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15253 NOT_IN_WOS en
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
language English
topic Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence
spellingShingle Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence
CHAMMIKA N B UDALAGAMA
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
description Ph.D
author2 PHYSICS
author_facet PHYSICS
CHAMMIKA N B UDALAGAMA
format Theses and Dissertations
author CHAMMIKA N B UDALAGAMA
author_sort CHAMMIKA N B UDALAGAMA
title Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
title_short Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
title_full Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
title_fullStr Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
title_full_unstemmed Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
title_sort optimization and computer control of the sub-100 nm, proton beam writing facility at ciba
publishDate 2010
url http://scholarbank.nus.edu.sg/handle/10635/15253
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