Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
Ph.D
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2010
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/15253 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Language: | English |
id |
sg-nus-scholar.10635-15253 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-152532015-01-12T20:09:15Z Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA CHAMMIKA N B UDALAGAMA PHYSICS WATT, FRANK BETTIOL, ANDREW ANTHONY Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:51:35Z 2010-04-08T10:51:35Z 2006-04-11 Thesis CHAMMIKA N B UDALAGAMA (2006-04-11). Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15253 NOT_IN_WOS en |
institution |
National University of Singapore |
building |
NUS Library |
country |
Singapore |
collection |
ScholarBank@NUS |
language |
English |
topic |
Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence |
spellingShingle |
Proton Beam Writing, Delta-rays, PMMA, Automatic Beam Focusing, Rapid Imaging, SU-8, Luminescence CHAMMIKA N B UDALAGAMA Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
description |
Ph.D |
author2 |
PHYSICS |
author_facet |
PHYSICS CHAMMIKA N B UDALAGAMA |
format |
Theses and Dissertations |
author |
CHAMMIKA N B UDALAGAMA |
author_sort |
CHAMMIKA N B UDALAGAMA |
title |
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
title_short |
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
title_full |
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
title_fullStr |
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
title_full_unstemmed |
Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA |
title_sort |
optimization and computer control of the sub-100 nm, proton beam writing facility at ciba |
publishDate |
2010 |
url |
http://scholarbank.nus.edu.sg/handle/10635/15253 |
_version_ |
1681079163704836096 |