DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/153374 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-1533742020-11-19T13:57:29Z DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS WANG HUIJUN MECHANICAL & PRODUCTION ENGINEERING QIN SHAOWEN Master's MASTER OF ENGINEERING 2019-04-18T08:01:11Z 2019-04-18T08:01:11Z 1998 Thesis WANG HUIJUN (1998). DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153374 CCK BATCHLOAD 20190405 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
MECHANICAL & PRODUCTION ENGINEERING |
| author_facet |
MECHANICAL & PRODUCTION ENGINEERING WANG HUIJUN |
| format |
Theses and Dissertations |
| author |
WANG HUIJUN |
| spellingShingle |
WANG HUIJUN DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| author_sort |
WANG HUIJUN |
| title |
DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| title_short |
DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| title_full |
DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| title_fullStr |
DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| title_full_unstemmed |
DESIGN AND ANALYSIS OF MICROMECHANICAL SYSTEMS FOR MICRO ELECTROSTATIC ACTUATORS |
| title_sort |
design and analysis of micromechanical systems for micro electrostatic actuators |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/153374 |
| _version_ |
1686108208196747264 |