TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING

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Bibliographic Details
Main Author:	ZOU TING
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	Titanium nitride (TiN) thin film reactive dc magnetron sputtering deposition temperature nitrogen flow rate crystal structure surface morphology roughness hardness and adhesion
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153882
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153882
record_format	dspace
spelling	sg-nus-scholar.10635-1538822024-10-26T00:11:28Z TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING ZOU TING SINGAPORE-MIT ALLIANCE JENNY LAM KANG XUEJUN CHUA SOO JIN Titanium nitride (TiN) thin film reactive dc magnetron sputtering deposition temperature nitrogen flow rate crystal structure surface morphology roughness hardness and adhesion Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Dissertation Supervisors: 1. Dr. Jenny Lam, Tinggi Technologies 2. Dr. Kang Xuejun, Tinggi Technologies 3. Prof. Chua Soo Jin, SMA Fellow, NUS 2019-05-09T04:10:18Z 2019-05-09T04:10:18Z 2006 Thesis ZOU TING (2006). TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153882 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Titanium nitride (TiN) thin film reactive dc magnetron sputtering deposition temperature nitrogen flow rate crystal structure surface morphology roughness hardness and adhesion
spellingShingle	Titanium nitride (TiN) thin film reactive dc magnetron sputtering deposition temperature nitrogen flow rate crystal structure surface morphology roughness hardness and adhesion ZOU TING TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ZOU TING
format	Theses and Dissertations
author	ZOU TING
author_sort	ZOU TING
title	TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
title_short	TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
title_full	TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
title_fullStr	TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
title_full_unstemmed	TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING
title_sort	titanium nitride film deposited reactive dc magnetron sputtering
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153882
_version_	1821195760714121216

TITANIUM NITRIDE FILM DEPOSITED REACTIVE DC MAGNETRON SPUTTERING

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