INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD

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Bibliographic Details
Main Author:	WU RUIHONG
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	photovoltaic solar cell multi-crystalline silicon PECVD silicon nitride anti-reflection surface passivation bulk passivation carrier life time edge discoloration
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153957
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153957
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spelling	sg-nus-scholar.10635-1539572024-10-26T00:11:46Z INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD WU RUIHONG SINGAPORE-MIT ALLIANCE YEO TECK CHEONG YOON SOON FATT photovoltaic solar cell multi-crystalline silicon PECVD silicon nitride anti-reflection surface passivation bulk passivation carrier life time edge discoloration Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS Dissertation supervisors: 1. Mr Yeo Teck Cheong, Process Engineering Manager, REC Cell 2. Professor Yoon Soon Fatt, SMA fellow, NTU 2019-05-10T04:54:19Z 2019-05-10T04:54:19Z 2010 Thesis WU RUIHONG (2010). INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153957 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	photovoltaic solar cell multi-crystalline silicon PECVD silicon nitride anti-reflection surface passivation bulk passivation carrier life time edge discoloration
spellingShingle	photovoltaic solar cell multi-crystalline silicon PECVD silicon nitride anti-reflection surface passivation bulk passivation carrier life time edge discoloration WU RUIHONG INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE WU RUIHONG
format	Theses and Dissertations
author	WU RUIHONG
author_sort	WU RUIHONG
title	INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
title_short	INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
title_full	INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
title_fullStr	INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
title_full_unstemmed	INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD
title_sort	industrial deposition of silicon nitride on mc-si for solar cell production employing microwave pecvd
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153957
_version_	1821198984839954432

INDUSTRIAL DEPOSITION OF SILICON NITRIDE ON MC-SI FOR SOLAR CELL PRODUCTION EMPLOYING MICROWAVE PECVD

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