FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)

FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)

Master's

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Bibliographic Details
Main Author: LUO JIA
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Theses and Dissertations
Published: 2019
Subjects:
VCSEL
Oxidation
Deal & Grove Model
Selectivity
Repeatability
MSA
Uniformity
Oxidation Rate
Gas Flow
Furnace
Online Access:https://scholarbank.nus.edu.sg/handle/10635/153964
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/153964

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